Parylene Deposition System

Instrument name

Parylene Deposition System

Manufacturer

KARYNANOTECH

Model

KR350HS

Specifications

Vacuum pump: 28 m³/H, ultimate: 0.75 Pa

Cold trap: ≤ -90 °C

Cracking furnace: 650 ℃~800 ℃

Evaporation temperature: room temperature ~ 200 °C, deviation: ±2 °C

Function and applications

Chemical vapour deposition for the preparation of Parylene coatings for the coating and protection of circuit boards, microelectronic semiconductor products, medical products, etc., for the preparation of transparent flexible substrates, etc.

Contact

Yanyun Liu

Tel.

65883196

E-mail

yyliu1@suda.edu.cn