Surface Profiler

Instrument name

Surface Profiler 

Model

D-10

Manufacturer

KLA-Tencor

Specifications

Minimum positive pressure: 0.03 mg

Optimal Vertical resolution: 0.38 A

Maximum vertical Measurement Range: 800 um

Applications and Uses

The surface profiler is used for various materials film 

thickness measurement.

Contacts

Xumin Yang

Contact number

65884226

E-mail

xmyang@suda.edu.cn