题目：

Fabrication of graphene MEMS by standard transfer: high performance atomic force microscope tips

作者：

Fei Hui¹, Marc Porti², Montserrat Nafria², Huiling Duan³, Mario Lanza^1,2*

单位：

1 Institute of Functional Nano & Soft Materials, Soochow University, 199 Ren-Ai Road, Suzhou, 215123, China

2 Electronic Engineering Department, Universitat Autonoma de Barcelona, 08193, Cerdanyola del Valles, Spain

3 State Key Laboratory for Turbulence and Complex Systems, CAPT, Department of Mechanics and Engineering Science, College of Engineering Peking University, Beijing 100871, China

摘要：

Abstract-Scanning probe microscopes (SPM) are commonly used for characterization of the topographic and electrical properties of materials at the nanoscale. In such setup, the probes play a prominent role to obtain reliable imaging, but most tips lose their intrinsic properties after some measurements. Here, we modified the metal varnished atomic force microscope tips by transferring a sheet of graphene on them. The resulting graphene micro-electromechanical system (MEMS) � AFM tips are characterized by means of optical microscope, scanning electron microscope (SEM), energy dispersive Xray microscope (EDX) and atomic force microscope (AFM). Our graphene-coated tips achieved lifetimes 10 times larger than the uncoated counterparts, improving the quality and reducing the cost of research.

影响因子：

IEEE Conference proceedings

分区情况：

IEEE Conference proceedings

链接：

http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=7087444&matchBoolean%3Dtrue%26queryText%3DFabrication+of+graphene+MEMS+by+standard+transfer%3A+high+performance+atomic+force+microscope+tips